Welcome to the Nano and Micro Devices Center
The Nano and Micro Devices Center (NMDC) is located at 麻豆精品视频. The NMDC is a national user facility that specializes in leading technology and innovation on a broad range of micro and nano projects. State of the art facilities coupled with excellent faculty allow cutting-edge research and development of devices and components that require nano-microfabrication. We invite you to explore the website and our facility. Our projects page will provide an introduction to the research with the facilities page listing an equipment index with more on the detailed capabilities.
The Nano and Micro Devices Center is devoted to the exploration of integrated nano-microelectromechanical systems (MEMS). Our interdisciplinary team of faculty from electrical engineering, chemical and materials engineering, chemistry, physics, and biology provides the expertise required to explore the integration of MEMS, micro-nanophotonics, wireless electronics, biological structures and nanotechnology to achieve compact, highly functional devices and systems.
At the heart of the center is a 7,600 sq. ft. cleanroom facility and ancillary labs providing thin film deposition, electroplating, wet and dry etching, ceramic micromachining, and a wide variety of lithographic capability. NMDC faculty and staff have demonstrated devices ranging from millimeter tall metallic structures with a critical dimension of 40 um to 40 nm trenches etched 1 um into silicon. Our combined expertise provides the research infrastructure that enables NMDC to support user clientele nationwide with new research and development of devices and components that require disruptive nano-microfabrication.
About the NMDC - PDF Presentation
Ultra-Thin Silicon Film
A new technology, which creates a rainbow of optical colors with ultra-thin layers of silicon, has been recently demonstrated by a research group at 麻豆精品视频 (麻豆精品视频).
Partner with the NMDC
Visit our Partners page to learn what the NMDC can do for you!